MCP - The MEMS Characterization Platform

State: ACTIVE
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The MEMS Characterization Platform is dedicated to the electromechanical characterization of MEMS sensors. Without the need of any interface board, it easily delivers relevant information about the MEMS under test (rest capacitance, stationary CV curves with pull-in and pull-out, resonance frequency and Q factor time-domain and frequency-domain analysis). Dedicated routines are developed for the characterization of fatigue, adhesion phenomena, quadrature error evaluation in gyroscopes, and nonlinearity characterization of resonant structures.The system includes the generation of single-ended or push-pull driving stimuli and a differential capacitive or piezoresistive readout.

Key Features
  • 10fF - 100pF Capacitance Measurement Range
  • <1fF rms Capacitance resolution (10aF optional)
  • Up to 130kHz Dynamic Capacitance variation
  • 1mV - 40V Drive voltage (100V optional)
  • "In-operation" chacarterization capabilities
  • Piezoresistive readout (optional)

Download Brochure        Featured Videos

Application Notes:
  1. The ITmems-MCP (hand)book. A simple step-by-step guide to introduce the use of the MCP in MEMS characterization

  • Watch the MCP coupled with other instruments
    • Watch the MCP coupled with other instruments

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  • Over-damped accelerometer
    • Over-damped accelerometer

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  • Nano-gauge gyroscope temperature characterization
    • Nano-gauge gyroscope temperature characterization

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  • On-wafer characterization of quadrature
    • On-wafer characterization of quadrature

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Multi-channel C2V converter

State: DEVELOPMENT
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Accurate capacitance measurements represents one of the main issue in many sensing applications. ITmems delivers Capacitance-to-Voltage converters boards customized on your application needs.

Available as stand alone product for characterization purpose or as OEM board for easy integration in customer applications.

  Target Key features
  • 10fF - 100pF Capacitance Measurement Range
  • 1fF rms capacitive resolution
  • 100kHz operative Bandwidth
  • Single-ended and Differential Multi-channel option

Closed-loop Boards for Gyroscopes and Resonators

State: DEVELOPMENT
Push-pull or single ended drive boards feauturing closed-loop amplitude gain control. The best yet the most versatile solution to drive gyroscopes and resonators.
Available as stand alone product for characterization purpose or as OEM board for easy integration in customer applications.
  Target Key features
  • 5kHz - 50kHz frequency range
  • Q-factor range: 200-200000
  • 100fF - 20pF capacitance range

Peltier-based micro-chamber

State: DEVELOPMENT

Temperature characterization is mandatory for sensor manufacturing. This very compact climate chamber is built to be mounted on existing test setups such as rate-tables, flipping tables, magnetic field generators.

  Target Key features
  • -10°C - 85°C Temperature range
  • Chamber Volume
  • Accurate reference temperature sensor