Micro-Electro-Mechanical Systems (MEMS) are probably the most disruptive technology of the 21st century. Similarly to what occurred for electron devices in the past decades, MEMS are challenging the instrumentation community asking for new specific and versatile test equipment, capable of precise electrical and mechanical measurements for bare and packaged devices.
 

Thanks to the MCP capabilities you can easily measure all typical parameters you may need. Here you can find some examples and related demo videos.


MEMS capacitive accelerometers

  • Over-Damped Accelerometers
    • Over-Damped Accelerometers

    • Watch Video

  • FM Accelerometers
    • FM Accelerometers

    • Watch Video

  • Calibration and C0
    • Calibration and C0

    • Watch Video

  • MEMS capacitive accelerometers
    • MEMS capacitive accelerometers

    • Watch Video

1/1
Key parameters to measure and characterize:
  • the capacitance at rest, the mechanical offset,
  • the electrical sensitivity to an externally applied voltage (dC/dV),
  • the pull-in and pull-out voltages (relevant for reliability, against stiction related failures),
  • the Q-factor (from over-damped values for automotive applications, to typically under-damped values for low-noise applications),
  • ...

MEMS capacitive gyroscopes

  • Frequency Sweep
    • Frequency Sweep

    • Watch Video

  • Resonance Freq and Q-factor
    • Resonance Freq and Q-factor

    • Watch Video

  • On-wafer Quadrature Characterization
    • On-wafer Quadrature Characterization

    • Watch Video

  • Nano-gauge gyroscope temperature characterization
    • Nano-gauge gyroscope temperature characterization

    • Watch Video

1/1
Key parameters to measure and characterize:
  • the capacitance at rest position between the rotor and the drive stators,
  • capacitance at rest position between the rotor and the sense stators,
  • the capacitance offset,
  • the electrical sensitivity to an external applied voltage for both drive and sense stators,
  • the resonance frequency both of the drive mode and the sense mode,
  • the frequency mismatch between the drive mode and the sense mode (a fundamental parameter related to “mode-split” gyroscope sensitivity),
  • the Q-factors of the drive mode and the sense mode (typically much larger than in the case of accelerometers),
  • the quadrature error (in-phase signal feedthrough of the drive mode into the sense mode - fundamental parameter related to long term stability of a gyroscope).
 

Material and Phenomena characterization

  • CV Curves
    • CV Curves

    • Watch Video

  • Non linearities
    • Non linearities

    • Watch Video

  • Tunable Resonator
    • Tunable Resonator

    • Watch Video

1/1
With micro-fabrication technology continuously evolving, new materials being added to micromachining processes, and critical features scaling down to sub-micrometric dimensions, MEMS designers often lack of information about the characteristics of their materials at the typical MEMS scale, where the surface to volume ratio is high and determines materials properties different from bulk level, and often dominated by surface phenomena.
  • Fatigue induced failure mode monitoring
  • Adhesion force monitoring
  • Mechanical and Electrical Non-linearities
 

Measurement Database and Automatic Routines

  • Project Files
    • Project Files

    • Watch Video

    • Watch Video

1/1
The software included with the MCP allow easy and efficient measurement storage and the ability to create user routines!